Detailed Structure of Vacuum Coating Machine
High-vacuumcoating machine, coating machine is currently a wide range of equipment for
producing vacuum conditions. Its related components and components: mechanical
pump, booster pump, oil diffusion pump, condensate pump, vacuum measurement
system.
1.
Vacuum main body-vacuum chamber
Depending
on the requirements of the processed products, the size of the vacuum chamber
is different. Currently, the diameters of the vacuum chamber are 1.3M, 0.9M,
1.5M, 1.8M, etc. The chamber is made of stainless steel, which requires no
rust, solidity, etc., vacuum Each part of the cavity is provided with a
connecting valve for connecting each pump.
2.
Auxiliary air extraction system
This
exhaust system is composed of "diffusion pump + mechanical pump + roots
pump + cryogenic cold trap + polycold"
The
exhaust process is: the mechanical pump first pumps the vacuum chamber to a low
vacuum state less than 2.0*10-2PA, which provides a prerequisite for the
subsequent vacuuming of the diffusion pump, and then when the diffusion pump
pumps the vacuum chamber, the mechanical pump cooperates with oil diffusion The
pumps are connected in series to complete the pumping action in this way.
The
exhaust system is an important part of the vacuum system of the coating
machine, which mainly consists of three parts: mechanical pump, booster pump
(mainly introduces Roots pump), and oil diffusion pump.
Mechanical
pump: also called backing pump. Mechanical pump is a kind of low vacuum pump
that is widely used. It uses oil to maintain the sealing effect and relies on
mechanical methods to continuously change the volume of the suction cavity in
the pump to make the pumped container The volume of the gas continuously
expands to obtain a vacuum.
There
are many types of mechanical pumps. Commonly used are slide valve type (this is
mainly used in large equipment), piston reciprocating type, fixed vane type and
rotary vane type (this is currently widely used, this article mainly
introduces) four types.
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