Equipment for Uniformity and Stability of Magnetron Sputtering Coating


Magnetron sputtering is a type of physical vapor deposition used to prepare films of various materials such as metals, semiconductors, insulators, and the like. In the actual coating process, the deposition rate and sputtering power, sputtering time, distance from the target to the substrate, and working pressure affect the quality and thickness of the coating. In magnetron sputtering coating, as the number of uses increases, the target is consumed, and the target base distance becomes larger. When other parameters are not changed, the coated film will gradually not meet the requirements. The uniformity of the magnetic field affects the uniformity of the film. If the magnetic field is asymmetric, it will cause the position of the coating to shift.
Providing a multifunctional magnetron sputtering coating system that improves the uniformity and stability of magnetron sputtering coating, this system is integrated by a vacuum coating system and a glove box system, which can complete film evaporation in a high vacuum evaporation chamber. Plating, and sample storage, preparation and sample detection after evaporation in a glove box with high purity inert gas atmosphere. The combination of evaporation coating and glove box realizes the fully enclosed production of evaporation, packaging, and testing processes, so that the entire film growth and device preparation process is highly integrated in a complete controllable environment atmosphere system, eliminating the organic large area circuit preparation The influence of unstable factors in the atmospheric environment guarantees the preparation of high-performance, large-area organic optoelectronic devices and circuits.

The multi-purpose magnetron sputtering coating system is mainly used for preparing various metal films, semiconductor films, dielectric films, magnetron films, optical films, superconducting films, sensing films and functional films with special needs.

评论

发表评论

此博客中的热门博文

Common Faults and Solutions of Nichwell Glove Box (2)

图片
1. Turn off the cycle and analyzer at the same time Causes: ① the pressure in the tank is too high in an instant, exceeding + 12mbar, the system will automatically protect; ② the voltage is unstable, causing system protection. Methods: ① check whether the pressure setting is correct, whether the pressure sensor is abnormal, whether the box vacuum valve or air supply valve is damaged, and then open the analyzer and cycle after the pressure returns to normal. ② Check whether the vacuum pump is broken and cannot operate. 2. Main antechamber and min antechamber can't replenish air Causes: ① the air hole leading to the large and small bins in the glove box may be blocked by plastic film; ② whether the solenoid valve is not opened. Methods: ① determine the position of air hole and dredge the pipeline according to the pipeline direction; ② check the pipeline and solenoid valve. 3. Main antechamber and min antechamber are unable to pump air Causes: ① the suctio
阅读全文

Application of Leybold Vacuum Pump in Refrigeration Equipment

The structure and working principle of Leybold vacuum pump The commonly used vacuum pump is the Leybold vacuum pump, which relies on the rotary vane to periodically change the working volume of the pump chamber (cylinder) to pump air. The structure of the Leybold vacuum pump is similar to that of a reciprocating piston compressor. When working, the suction pipe is connected to the vacuum container, and the exhaust pipe is directly connected to the atmosphere. Leybold vacuum pumps have a large pumping capacity, with a pumping rate ranging from 45 to 20000 cubic meters per hour. The ultimate pressure of a single-stage pump is about 103 Pa, and a two-stage pump can reach 1 Pa. Leybold vacuum pumps can be used for vacuum distillation, vacuum concentration, vacuum crystallization, vacuum filtration, vacuum drying and concrete vacuum operations. If a condenser is installed at the suction port of the pump, the gas containing steam can be removed; if a filter is installed, the dust-containin
阅读全文

Dazzling under the Light, use the Lighting to Create a Perfect Family Atmosphere

图片
The lighting design of a family is indispensable. Lighting is the soul of space. Different types of lighting can also create different light and shadow effects. In the design of home decoration, there are many points to pay attention to in the design of home lighting. The living room should be very rich and layered, the restaurant should be romantic and stylish, the study and kitchen should be bright and practical, the bedroom should be warm and comfortable, and the bathroom must be round and refreshing. Classification of Home Lighting : Indoor home lamps can be divided into chandeliers, ceiling lamps, wall lamps, spot lamps, table lamps, floor lamps according to the installation method. Chandeliers: Today's chandelier can basically be adjusted in height, which can be limited to space market needs with different heights. But it is best not to fall too short, so as not to block your sight or feel really glare. Chandeliers are commonly used in homes as living rooms, be
阅读全文