Application and Fabrication of Multifunctional Magnetron Sputtering Coating System


The common products used in the production of coated glass can not meet the higher requirements. In the prior art, there are some problems such as complicated installation of coating unit, poor flexibility, low isolation coefficient, poor vacuum environment, low cooling efficiency, etc. a multifunctional magnetron sputtering coating system is provided. The system is composed of vacuum coating system and vacuum glove box system, which can complete the film evaporation in the high vacuum evaporation chamber, and store, prepare and test the samples after evaporation in the high-purity inert gas atmosphere of glove box.

The combination of evaporation coating and vacuum glove box can realize the closed production of evaporation coating, packaging, testing and other processes, so that the whole film growth and device preparation process are highly integrated in a complete system of controllable environment atmosphere, eliminating the influence of unstable factors in the atmospheric environment during the preparation of organic large-area circuit, and ensuring the preparation of high-performance and large-area organic photoelectric devices and circuits 。
The main purpose of multi-functional magnetron sputtering coating system is to prepare various metal films, semiconductor films, dielectric films, magnetron films, optical films, superconducting films, sensing films and functional films with special needs.

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